Description

• Title:
  A note on optical materials for photolithography applications
• Creator:
  Jain, A.;
  Roszkiewicz, A.;
  Nasalski, W.
• Description:
  Book/Chapter
• Object availability:
  free access
• Rights:
  Creative Commons Attribution BY 4.0 license;
  Copyright-protected material. [CC BY 4.0] May be used within the scope specified in Creative Commons Attribution BY 4.0 license, full text available at:;
  - ;
  Open
• Date:
  2018.12.31;
  2018
• Type:
  Text
• Language:
  English
• Publisher:
  IPPT PAN
• Relation:
  IPPT Reports on Fundamental Technological Research
• Data provider:
  Repozytorium Cyfrowe Instytutów Naukowych
• Can I use it?:
  seek permission
• Type:
  text